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Amphibian™ Systems provides advanced exposure tools, instruments,
metrology systems, and prototype equipment for research in areas
of photoresist materials, optical components testing, immersion
fluids, and advanced lithographic development.
 
Advances in UV optical lithography
will extend toward the nanoscale for application in the fields of
semiconductor devices, nano and micro structures, advanced packaging,
bio devices, and optical components. Amphibian™ Systems provides
the technology needed for the fabrication, measurement, and testing
of the nano-scale structures used in these fields. |
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193i resist images 45nm resolution
Amphibian™ Systems has developed
lithography tools for research into materials and processes extending
toward the 32nm device generations. These systems provide the
early learning required for applications identified by the International
Technology Roadmap for Semiconductors (ITRS) out to the year 2013.
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